A micro transmission system based on SOI-MEMS technology: improvement and characteristics

摘要

In this paper, we have improved and developed a micro transmission system (MTS) with combination of the comb-drive actuators, the ratchet mechanism and elastic structures like beams, springs, etc. The MTS has been fabricated by a SOI-MEMS technology using single photo mask. The system is equipped with two parallel ratchet-actuators on both sides, and can stably drive a four-spring micro container with different velocities in proportion to the driving frequencies up to 40 Hz. Our experiments showed that the MTS not only works stably with one container, but also it can drive smoothly four containers at the same time with the applied voltage of 110 V. The results confirmed a higher stability and better loading capacity of the improved system.