Bilayer tunneling field effect transistor with oxide-semiconductor and group-IV semiconductor hetero junction: Simulation analysis of electrical characteristics

摘要

Operation mechanisms and electrical characteristics of tunneling field-effect transistors (TFETs) employing a hetero tunneling junction by utilizing an n-type oxide-semiconductor (OS) and a p-type group-IV-semiconductor are comprehensibly analyzed. Gate-normal band-to-band tunneling (BTBT) has high potential for the superior TFET performance such as high on-state current and small sub-threshold swing (S.S.). Additionally, a hetero tunneling junction with type-II energy band alignment is promising to exponentially increase tunneling probability with keeping small off-state current. Therefore, in this study, we investigate the impact of key material and device parameters such as energy band alignment of source/channel regions and thickness of the OS channel layer or gate insulator based on technology computer aided design (TCAD) simulation. The gate-controlled uniform band bending along the source-drain direction realizes uniform BTBT in the entire region of the hetero tunneling junction. Also, the reduction of the tunneling barrier height, which is continuously controlled by the conduction band minimum of the OS-channel and the valence band maximum of the IV-source, is effective to increases on-state current and decrease S.S. value. On the other hand, the thicknesses of OS channel layer and gate insulator have strong influences on tunneling probability and threshold voltage. Therefore, the sub-threshold characteristics of TFETs are sensitive to non-uniformities in the tunneling junction such as channel thickness fluctuation and surface potential fluctuation at the metal-oxide-semiconductor (MOS) interfaces. These numerical analyses of the device operation are essentially important to understand the effects of key device parameters on the TFET performance and to realize the superior electrical performance.