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Sensor-based microassembly of hybrid MEMS devices

机译:混合MEMS器件的基于传感器的微组件

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The technology barrier that micromanipulation presents to many emerging fields requires that control and assembly issues in ultra-high precision motion control be addressed. In this article, we first discuss the important differences that exist between microassembly and traditional automatic assembly. We then overview ongoing efforts in microassembly and approaches being pursued. The use of vision-based feedback has been identified as one of the more promising approaches for controlling the microassembly process, and the field of visual servoing is discussed. Applications of the field to micropositioning are demonstrated. The importance of force in assembly is obvious, and developments in force sensing at the scales required are also discussed. As microassembly matures and robust, economical micromanipulation strategies are developed. Microelectromechanical system (MEMS) designers will envision a myriad of new hybrid MEMS devices previously thought impossible to manufacture.
机译:微观操纵给许多新兴领域带来的技术障碍要求解决超高精度运动控制中的控制和装配问题。在本文中,我们首先讨论微型装配与传统自动装配之间存在的重要差异。然后,我们概述了微装配中正在进行的努力和所采用的方法。基于视觉的反馈的使用已被确定为控制微装配过程的最有前途的方法之一,并讨论了视觉伺服领域。演示了该领域在微定位中的应用。力在装配中的重要性是显而易见的,并且还讨论了在所需规模​​上力感测的发展。随着微组件的成熟和强大,经济的微操纵策略得以发展。微机电系统(MEMS)的设计人员将设想出许多以前认为不可能制造的新型混合MEMS器件。

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