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Design, Fabrication, and Visual Servo Control of an XY Parallel Micromanipulator With Piezo-Actuation

机译:具有压电驱动的XY并联微操纵器的设计,制造和视觉伺服控制

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摘要

This paper presents a complete design and development procedure of a new XY micromanipulator for two-dimensional (2-D) micromanipulation applications. The manipulator possesses both a nearly decoupled motion and a simple structure, which is featured with parallel-kinematic architecture, flexure hinge-based joints, and piezoelectric actuation. Based on pseudo-rigid-body (PRB) simplification approach, the mathematical models predicting kinematics, statics, and dynamics of the XY stage have been obtained, which are verified by the finite-element analysis (FEA) and then integrated into dimension optimization via the particle swarm optimization (PSO) method. Moreover, a prototype of the micromanipulator is fabricated and calibrated using a microscope vision system, and visual servo control employing a modified PD controller is implemented for the accuracy improvement. The experiments discover that a workspace size of $260 mu{rm m}times 260 mu{rm m}$ with a 2-D positioning accuracy and repeatability around 0.73 and 1.02 $mu{rm m}$, respectively, can be achieved by the micromanipulator.
机译:本文介绍了一种用于二维(2-D)微操纵应用的新型XY微操纵器的完整设计和开发过程。该机械手具有几乎解耦的运动和简单的结构,并具有并联运动结构,基于挠性铰链的关节和压电致动装置。基于伪刚体(PRB)简化方法,获得了预测XY平台的运动学,静力学和动力学的数学模型,并通过有限元分析(FEA)进行了验证,然后将其集成到尺寸优化中粒子群优化(PSO)方法。此外,使用显微镜视觉系统来制造和校准微操纵器的原型,并实施采用改进的PD控制器的视觉伺服控制以提高精度。实验发现,通过以下方法可以实现工作区大小为260μm×260μm×2 d的二维定位精度和可重复性分别约为0.73和1.02μm/μm。微操纵器。

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