Working group seeks to form Exit Charge standard for semiconductor process equipment

摘要

Working group seeks to form Exit Charge standard for semiconductor process equipment Electrostatic charges are the cause of a wide array of problems in semiconductor manufacturing processes, ranging from circuit damage to particle contamination to equipment malfunctioning. Static-related problems are believed to cost the industry more than $100 million a year in lost productivity and reduced yields. "The effects of electrostatic surface charges in semiconductor production are well-known, and a number of methods have been