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The impact of thickness on the optical, electrical and dielectric properties of nanocrystalline 0.9 MTO-0.1BNO composite thin films

机译:厚度对纳米晶0.9MTO-0.1BNO复合薄膜的光学,电气和介电性能的影响

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The 0.9 MgTiO3-0.1Ba(5)Nb(4)O(15) (0.9MTO-0.1BNO) thin films deposited on Pt (111)/TiO2/SiO2/Si (100) and SiO2 substrates by RF reactive magnetron sputtering have been reported. The films are deposited at a substrate temperature of 400 degrees C under 50/50 argon (Ar-2)/oxygen (O-2) mixed ambiance by varying the film thickness. The X-ray diffraction (XRD) and high resolution transmission electron microscopy (HRTEM) studies have confirmed presence of both MTO and BNO phases.. The obtained strain in the films is found to be reduced with an increase in film thickness. The 3d crystal structure of MTO exhibited significant variations in bond length for the films with different thicknesses. The dispersion in the refractive index of the films has obtained using the single electronic oscillator model, and the obtained bandgap value is found to be reduced from 3.75 to 3.34 eV with an increase in film thickness from 150 to 340 nm, accordingly. The films revealed uniform spherical shaped particles with smooth surface with small rms roughness values around 2.9 to 2 nm. The microwave and low frequency dielectric responses showed improvment with an increase in film thickness. The impedance spectroscopy analysis displayed Cole-Cole behavior indicating the non-Debye conduction process present in the films. The frequency dependent conduction process has analyzed by Jonscher's Power law and the non-overlapping small polaron hopping nature has been observed. Extracted activation energies estimated from conductivity are found to be in the range of 0.31 eV to 0.14 eV. The leakage current density (J) with the applied potential has found to be in the range of 10(-6) A/cm(2) at 100 kV/cm(2) for 340 nm film. The obtained results suggest that these films are promising for optical and microwave integrated circuit applications.
机译:通过RF反应磁控溅射沉积在Pt(111)/ TiO 2 / SiO 2 / Si(100)和SiO 2基板上的0.9mgTiO 3 -0.1ba(5)Nb(4)O(15)(0.9mTo-0.1bno)薄膜已报道。通过改变膜厚度,在50/50氩(Ar-2)/氧(O-2)混合的氛围中在400℃的底物温度下沉积薄膜。 X射线衍射(XRD)和高分辨率透射电子显微镜(HRTEM)研究证实了MTO和BNO相的存在。发现膜中所得菌株随着膜厚度的增加而降低。 MTO的3D晶体结构表现出具有不同厚度的膜的键合长度的显着变化。使用单一电子振荡器模型获得薄膜的折射率中的分散,并且发现所获得的带隙值从3.75到3.34eV降低,相应地增加了150至340nm的膜厚度。薄膜揭示了具有光滑表面的均匀球形颗粒,粗糙的粗糙度值为2.9至2nm。微波和低频介电响应显示出膜厚度的增加。阻抗光谱分析显示了COLE-COLE行为,表明薄膜中存在的非德义传导过程。通过Jonscher的权力法分析了频率依赖传导过程,并且已经观察到非重叠的小极化跳跃性质。发现从电导率估计的提取的激活能量在0.31eV至0.14eV的范围内。施加电位的漏电流密度(j)发现,在100kV / cm(2)的340nm膜的范围内为10(-6)/ cm(2)。所获得的结果表明,这些薄膜对光学和微波集成电路应用是有前途的。

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