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The impact of thickness on the optical, electrical and dielectric properties of nanocrystalline 0.9 MTO-0.1BNO composite thin films

机译:厚度对0.9 MTO-0.1BNO纳米晶复合薄膜光学,电学和介电性能的影响

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The 0.9 MgTiO3-0.1Ba(5)Nb(4)O(15) (0.9MTO-0.1BNO) thin films deposited on Pt (111)/TiO2/SiO2/Si (100) and SiO2 substrates by RF reactive magnetron sputtering have been reported. The films are deposited at a substrate temperature of 400 degrees C under 50/50 argon (Ar-2)/oxygen (O-2) mixed ambiance by varying the film thickness. The X-ray diffraction (XRD) and high resolution transmission electron microscopy (HRTEM) studies have confirmed presence of both MTO and BNO phases.. The obtained strain in the films is found to be reduced with an increase in film thickness. The 3d crystal structure of MTO exhibited significant variations in bond length for the films with different thicknesses. The dispersion in the refractive index of the films has obtained using the single electronic oscillator model, and the obtained bandgap value is found to be reduced from 3.75 to 3.34 eV with an increase in film thickness from 150 to 340 nm, accordingly. The films revealed uniform spherical shaped particles with smooth surface with small rms roughness values around 2.9 to 2 nm. The microwave and low frequency dielectric responses showed improvment with an increase in film thickness. The impedance spectroscopy analysis displayed Cole-Cole behavior indicating the non-Debye conduction process present in the films. The frequency dependent conduction process has analyzed by Jonscher's Power law and the non-overlapping small polaron hopping nature has been observed. Extracted activation energies estimated from conductivity are found to be in the range of 0.31 eV to 0.14 eV. The leakage current density (J) with the applied potential has found to be in the range of 10(-6) A/cm(2) at 100 kV/cm(2) for 340 nm film. The obtained results suggest that these films are promising for optical and microwave integrated circuit applications.
机译:通过射频反应磁控溅射在Pt(111)/ TiO2 / SiO2 / Si(100)和SiO2衬底上沉积的0.9 MgTiO3-0.1Ba(5)Nb(4)O(15)(0.9MTO-0.1BNO)薄膜具有被报道。通过改变膜厚,在50/50氩气(Ar-2)/氧气(O-2)的混合气氛下,在400℃的基板温度下沉积膜。 X射线衍射(XRD)和高分辨率透射电子显微镜(HRTEM)研究已证实MTO和BNO相均存在。发现膜中的应变随膜厚的增加而降低。对于具有不同厚度的薄膜,MTO的3d晶体结构在键长上显示出显着变化。使用单个电子振荡器模型已经获得了膜的折射率的分散,并且发现获得的带隙值从3.75eV降低到3.34eV,因此膜厚从150nm增加到340nm。薄膜显示出均匀的球形颗粒,表面光滑,均方根粗糙度值小,约为2.9至2 nm。微波和低频介电响应随着膜厚度的增加而改善。阻抗谱分析显示出科尔-科尔行为,表明膜中存在非德拜导电过程。频率依赖的传导过程已通过Jonscher幂定律进行了分析,并且观察到了非重叠的小极化子跳跃特性。由电导率估算的提取活化能被发现在0.31 eV至0.14 eV的范围内。发现对于340 nm薄膜,在100 kV / cm(2)时,具有施加电势的泄漏电流密度(J)在10(-6)A / cm(2)的范围内。所获得的结果表明这些膜对于光学和微波集成电路应用是有希望的。

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