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Implementation of AFM tip-based nanoscratching process on single crystal copper: Study of material removal state

机译:单晶铜上基于AFM尖端的纳米划痕工艺的实现:材料去除状态的研究

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摘要

The material removal state, which is closely related to machining quality, is an important factor in any machining process. During the machining using a non-rotational symmetric cutting tool, scratching direction manifests significant influence on the material removal state. In the present study, the relationship between material removal mode and scratching direction was investigated during the nanoscratching process on single crystal copper using an atomic force microscopy (AFM) tip. Considering the installation angle of the cantilever and the height of pile-up, a theoretical model was developed to relate machining depth with normal load for the machining of a single groove. Experimental results revealed that the theoretical normal load model was more suitable when materials were expelled in constant chip formation with small pile-ups. In addition, based on the scratching tests in different directions, the critical included cutting angle determined whether materials were expelled in chip formation or not. The height of pile-up was also influenced by the included cutting angle during the scratching in face-forward direction; however, during the machining in edge-forward direction, the distance between the cutting swept faces formed by the lateral and front edges determined the height of pile-up. Finally, an optimal machining direction is selected based on the quality of the machined grooves, which can be used in the potential application.
机译:与加工质量密切相关的材料去除状态是任何加工过程中的重要因素。在使用非旋转对称切削刀具进行加工的过程中,刮擦方向对材料去除状态产生了显着影响。在本研究中,使用原子力显微镜(AFM)尖端研究了在单晶铜的纳米划痕过程中材料去除模式与划痕方向之间的关系。考虑到悬臂的安装角度和堆积高度,建立了一个理论模型,将加工深度与法向载荷相关联,以加工单个凹槽。实验结果表明,当材料以恒定堆积形式以小堆积物排出时,理论法向载荷模型更为合适。此外,基于不同方向的刮擦测试,临界夹角切削角确定了材料是否以切屑形成方式排出。堆放的高度还受到正面刮擦过程中所包含的切削角度的影响;但是,在沿边缘向前的方向进行加工时,由侧边缘和前边缘形成的切削扫掠面之间的距离决定了堆积的高度。最后,根据加工凹槽的质量选择最佳的加工方向,这可以在潜在的应用中使用。

著录项

  • 来源
    《Applied Surface Science》 |2018年第30期|723-731|共9页
  • 作者单位

    Harbin Inst Technol, Minist Educ, Key Lab Microsyst & Microstruct Mfg, Harbin 150001, Heilongjiang, Peoples R China;

    Harbin Inst Technol, Ctr Precis Engn, Harbin 150001, Heilongjiang, Peoples R China;

    Harbin Inst Technol, Minist Educ, Key Lab Microsyst & Microstruct Mfg, Harbin 150001, Heilongjiang, Peoples R China;

    Harbin Inst Technol, Ctr Precis Engn, Harbin 150001, Heilongjiang, Peoples R China;

    Harbin Inst Technol, Ctr Precis Engn, Harbin 150001, Heilongjiang, Peoples R China;

  • 收录信息
  • 原文格式 PDF
  • 正文语种 eng
  • 中图分类
  • 关键词

    AFM; Tip-based machining; Normal load; Material removal state;

    机译:原子力显微镜;基于尖端的加工;法向载荷;材料去除状态;

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