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Long-term stability of photodetectors based on graphene field-effect transistors encapsulated with Si_3N_4 layers

机译:基于Si_3N_4层封装的石墨烯场效应晶体管的光电探测器的长期稳定性

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摘要

Graphene photodetectors have drawn a lot of interest due to their superior properties. For entering real applications, the existing open-face graphene photodetectors need to be properly protected to obtain long term stability. Here we demonstrate a facile method to obtain air-stable graphene photodetectors by directly depositing Si3N4 layer on the surface of buried-gate graphene field-effect transistors (GFETs). The electrical and photoelectrical properties of the Si3N4-encapsulated GFETs were carefully investigated and compared with that of the reference open-face GFETs. A photoresponsivity of 6.3 mA/W was obtained under a gate bias of 6 V, which was over 4 times higher than the photoresponsivities of typical back-gated GFET photodetectors under gate biases up to 80 V. Furthermore, the Si3N4-encapsulated GFET photodetectors demonstrated good stability for several months.
机译:石墨烯光电探测器由于其优越的性能而引起了人们的极大兴趣。为了进入实际应用,需要对现有的裸露石墨烯光电探测器进行适当的保护,以获得长期稳定性。在这里,我们演示了一种通过在埋入式栅极石墨烯场效应晶体管(GFET)的表面上直接沉积Si3N4层来获得空气稳定的石墨烯光电探测器的简便方法。仔细研究了Si3N4封装的GFET的电学和光电性能,并将其与参考敞口GFET的电学和光电性能进行了比较。在6 V的栅极偏置下获得6.3 mA / W的光敏度,这是典型的背栅GFET光电检测器在80 V以下栅极偏置下的光敏性的4倍以上。此外,Si3N4封装的GFET光电检测器稳定好几个月。

著录项

  • 来源
    《Applied Surface Science》 |2018年第30期|164-170|共7页
  • 作者单位

    Beijing Jiaotong Univ, Sch Elect & Informat Engn, Beijing 100044, Peoples R China;

    Chinese Acad Sci, Inst Microelect, IMECAS, IC Adv Proc R&D Ctr,Key Lab Microelect Devices &, Beijing 100029, Peoples R China;

    Beijing Jiaotong Univ, Sch Elect & Informat Engn, Beijing 100044, Peoples R China;

    Beijing Jiaotong Univ, Sch Elect & Informat Engn, Beijing 100044, Peoples R China;

    Beijing Jiaotong Univ, Sch Elect & Informat Engn, Beijing 100044, Peoples R China;

  • 收录信息
  • 原文格式 PDF
  • 正文语种 eng
  • 中图分类
  • 关键词

    Graphene; FET; Photodetector; Si3N4; Long-term stability;

    机译:石墨烯;FET;光电探测器;Si3N4;长期稳定性;

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