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Design and laser fabrication of controllable non-Gaussian roughness surfaces at microscale

机译:微尺度可控非高斯粗糙度表面的设计与激光加工

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摘要

Surface structures at micro-ano-scale have been studied in many fields for their wide range of applications. To understand the interdependences between surface structures and functional performances accurately, fabrication methods of complex structures with controllable surface parameters are crucial to be investigated. Toward this purpose, 3D non-Gaussian surfaces were designed and fabricated here. Two typical design methods were compared, which are based on Johnson translator and Pearson translator respectively. Several suggestions were provided to improve the design accuracy and efficiency. Primary roughness surfaces have been fabricated by laser direct writing. Different scanning paths and designed structures were compared to optimize the fabrication accuracy. The statistical and spectral characteristics of the fabricated roughness surfaces were demonstrated to be in accord with the designed values.
机译:微米/纳米尺度的表面结构已在许多领域得到了广泛的应用研究。为了准确地了解表面结构和功能性能之间的相互依赖性,研究具有可控表面参数的复杂结构的制造方法至关重要。为了达到这个目的,这里设计并制造了3D非高斯表面。比较了两种典型的设计方法,分别基于Johnson转换器和Pearson转换器。提供了一些建议来提高设计精度和效率。初级粗糙度表面已通过激光直接写入制成。比较了不同的扫描路径和设计的结构,以优化制造精度。所制造的粗糙表面的统计和光谱特性被证明与设计值一致。

著录项

  • 来源
    《Applied Surface Science》 |2013年第1期|95-100|共6页
  • 作者单位

    Department of Precision Machinery and Precision Instrumentation, University of Science and Technology of China, Hefei 230026, People's Republic of China;

    Department of Precision Machinery and Precision Instrumentation, University of Science and Technology of China, Hefei 230026, People's Republic of China;

    Department of Precision Machinery and Precision Instrumentation, University of Science and Technology of China, Hefei 230026, People's Republic of China;

    Department of Precision Machinery and Precision Instrumentation, University of Science and Technology of China, Hefei 230026, People's Republic of China;

    Laboratory of Microfabrication, Institute of Physics, Chinese Academy of Sciences, Beijing 100190, People's Republic of China;

  • 收录信息
  • 原文格式 PDF
  • 正文语种 eng
  • 中图分类
  • 关键词

    Non-Gaussian roughness surface; Laser direct writing; Scanning probe microscopy;

    机译:非高斯粗糙度表面;激光直写;扫描探针显微镜;

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