Graphical '/> Optical constants of electroplated gold from spectroscopic ellipsometry
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Optical constants of electroplated gold from spectroscopic ellipsometry

机译:椭圆偏振光谱法测定电镀金的光学常数

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Graphical abstract Display Omitted Highlights Optical constants of electroplated gold are reported from 0.142 to 36μm. Optical constants were fit to an oscillator dispersion model. Extend published optical constants for gold beyond 25μm. For use in spacecraft thermal control the Drude model was extrapolated to 50μm. Abstract The optical constants of an opaque electroplated gold film (Laser Gold from Epner Technology Inc.), were determined by spectroscopic ellipsometry at room temperature over the spectral range from 0.142μm in the vacuum ultraviolet to 36μm in the infrared (photon energy range 0.034–8.75eV). Data from two separate ellipsometer instruments covering different spectral ranges were analyzed simultaneously. The optical constants n&k or ε12 were determined by fitting an oscillator dispersion model combining Drude, Gaussian, and Sellmeier dispersion functions to the experimental Ψ and Δ data. The data were analyzed using both an ideal bulk substrate model and a simple overlayer model to account for surface roughness. Including the optical surface roughness layer improved ellipsometric data fits in the UV, and using a separate Drude function for the surface layer improved fits in the infrared. The surface roughness was also characterized using an Atomic Force Microscope. Using an oscillator dispersion model for the optical constants determined in this work allows for more realistic extrapolation to longer infrared wavelengths. Extending optical constants out to 50μm and beyond is important for calibrating far-infrared reflectance measurements. Applications include understanding the thermal performance of cryogenic space-based instruments, such as the James Webb Space Telescope (JWST).
机译: 图形摘要 < ce:simple-para id =“ spar0040” view =“ all” /> 省略显示 突出显示 < ce:para id =“ par0005” view =“ all”>报告了电镀金的光学常数从0.142到36 μm。 •< / ce:label> 光学常数适合于振荡器色散模型。 将已发布的金的光学常数扩展至25 μm。 为在航天器热控制中使用,将Drude模型外推到50 μm。 摘要 的光谱范围内,通过光谱椭圆偏振法测定不透明电镀金膜(Epner Technology Inc.的Laser Gold)的光学常数。真空紫外线下的微米为36 em(光子能量范围为0.034–8.75 eV)。同时分析了来自两个单独的椭圆仪的数据,这些数据覆盖了不同的光谱范围。光学常数n&k或ε 1 &ε 2 通过拟合振荡器色散模型来确定Drude,Gaussian和Sellmeier色散对实验Ψ和Δ数据起作用。 使用理想的批量分析数据基底模型和一个简单的覆盖层模型来说明表面粗糙度。包括光学表面粗糙度层,改进的椭偏数据适合UV,并且对表面层使用单独的Drude函数,改进的红外适应性。还使用原子力显微镜对表面粗糙度进行了表征。 使用振荡器色散模型来确定本文中确定的光学常数可以对更长的红外波长进行更实际的推断。将光学常数扩展到50 μm甚至更高,对于校准远红外反射率测量非常重要。应用包括了解低温天基仪器(例如James Webb空间望远镜(JWST))的热性能。

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