Properties of NbTiN thin films prepared by reactive DC magnetronsputtering

摘要

We have prepared Nb1-xTixN (NbTiN) thin films by reactive dc magnetron sputtering without intentional heating. Superconducting properties were strongly related to sputtering conditions. Lattice parameters of NbTiN films approached that of bulk NbTiN on decreasing the N2 mole fraction in Ar and N2 sputtering gas mixture. The film orientation was also strongly related to the sputtering conditions such as gas pressure. NbN thin films could grow epitaxially on MgO(100) substrates and showed very smooth surfaces. We found that smooth NbTiN films could be obtained on MgO(100) substrates with an epitaxially grown NbN template layer