Rapid microfabrication of transparent materials using filamented femtosecond laser pulses

摘要

Microfabrication of transparent materials using femtosecond laser pulses has showed good potential towards industrial application. Maintaining pulse energies exceeding the critical self-focusing threshold by more than 100-fold produced filaments that were used for microma-chining purposes. This article demonstrates two different micromachining techniques using femtosecond filaments generated in different transparent media (water and glass). The stated micromachining techniques are cutting and welding of transparent samples. In addition, cutting and drilling experiments were backed by theoretical modelling giving a deeper insight into the whole process. We demonstrate cut-out holes in soda-lime glass having thickness up to 1 mm and aspect ratios close to 20, moreover, the fabrication time is of the order of tens of seconds, in addition, grooves and holes were fabricated in hardened 1.1 mm thick glass (Corning~® Gorilla~® glass). Glass welding was made possible and welded samples were achieved after several seconds of laser fabrication.