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SPATIALLY CHIRPED PULSES FOR FEMTOSECOND LASER ABLATION THROUGH TRANSPARENT MATERIALS
SPATIALLY CHIRPED PULSES FOR FEMTOSECOND LASER ABLATION THROUGH TRANSPARENT MATERIALS
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机译:通过透明材料进行飞秒激光烧蚀的空间精加工脉冲
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摘要
Temporal focusing of spatially chirped femtosecond laser pulses overcomes previous limitations for ablating high aspect ratio features with low numerical aperture (NA) beams. Simultaneous spatial and temporal focusing reduces nonlinear interactions, such as self-focusing, prior to the focal plane so that deep (~1 mm) features with parallel sidewalls are ablated at high material removal rates.
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