Density inhomogeneity in ferroelectric thin films

摘要

Structural investigations of Pb(Zr,Ti)O_3 (PZT) ferroelectric thin films derived by chemical solution deposition on Pt/TiO_x electrode stacks were performed using grazing incidence x-ray specular reflectivity of synchrotron radiation and transmission electron microscopy. A density inhomogeneity, i.e., a sublayer structure, in the PZT thin films was observed; the upper PZT sublayer had a lower density and the lower sublayer had a higher density. The influence of the density inhomogeneity, as a possible extrinsic contribution to size effects in ferroelectric thin films, was discussed.