Investigation of micromechanical cantilever sensors with microfocus grazing incidence small-angle x-ray scattering

摘要

Micromechanical cantilever arrays coated with polymer brushes are an alternative to traditional chemical sensors. A critical parameter for the sensor sensitivity is the coating quality, and small changes in the coating uniformity generate a different behavior of the sensors. Microfocus grazing incidence small-angle x-ray scattering proved to be a sensitive tool to characterize coating quality, enabling a structural and chemical coating analysis.