Low-Temperature Growth of Multiwalled Carbon Nanotubes by Surface-Wave Plasma-Enhanced Chemical Vapor Deposition Using Catalyst Nanoparticles

摘要

Carbon nanotubes (CNTs) have been grown by surface-wave plasma-enhanced chemical vapor deposition (CVD) using size-classified Co nanoparticles at low temperatures. A mesh grid is used in the remote plasma-enhanced CVD system for the suppression of ion bombardment damage from plasma. The control of the electric field distribution using a mesh grid with a narrower opening is effective for the CNT growth. Multiwalled CNTs are obtained at a low temperature of 400 ℃ under low ion-density conditions. No significant difference in the microscopic structure of the CNTs grown at temperatures between 400 and 500 ℃ is observed.