Parametric amplification performance analysis of a vibrating beam micro-gyroscope with size-dependent and fringing field effects

摘要

In this study, a parametric amplification model of a vibrating beam micro-gyroscope is established with the effects of size-dependent and fringing field taken into account. Compared with conventional electrostatic beam gyroscopes, piezoelectric films are added to the four surfaces of the rectangular beam of vibrating micro-gyroscopes. Due to piezoelectric effect, the beam will be subjected to an axial excitation, which provides parametric amplification to enlarge the transverse vibration and to enhance the sensitivity. The effects of the size-dependent, fringing field and piezoelectric voltages on static deflection, eigenvalue analysis and dynamic amplification of the vibrating beam micro-gyroscopes are investigated. The influence of damping on the stability analysis of the gyroscopic system is also studied. When the frequency of parametric excitation is twice the natural frequency of the system, it is found that higher piezoelectric AC voltage amplitudes within the stable region are given in both sense and drive directions, which may generate a better sensitivity of the vibrating beam micro-gyroscope.