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Mechanically Flexible Chip-to-Substrate Optical Interconnections Using Optical Pillars

机译:使用光学支柱的机械柔性芯片到基板光学互连

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摘要

We experimentally characterize the benefits of using surface-normal mechanically flexible optical waveguides, or optical pillars, for chip-to-substrate optical interconnection. In order to benchmark the performance of the optical pillars, the optical coupling efficiency from a light source to an optical aperture with and without an optical pillar is measured. For a light source with 12$^{circ}$ beam divergence, a 50 $times$ 150 $mu$m optical pillar improves the coupling efficiency by 2–4 dB compared to pillar-free (free-space) optical coupling. A 30 $times$ 150 $mu$m optical pillar improves the coupling efficiency by 3–4.5 dB. This demonstrates the importance of using optical pillars when small photodetectors (PDs) and dense optical input/outputs (I/Os) are needed. The optical excess losses of 50 $times$ 150 $mu$m optical pillars are measured to be less than 0.2 dB. Due to the high mechanical flexibility of the pillars, we also demonstrate that optical pillars enhance the optical coupling efficiency between the chip and substrate when they are misaligned in the lateral direction. This is especially important since the coefficient of thermal expansion of the chip and substrate are often mismatched, and preserving optical alignment and interconnection between them is critical during thermal excursions. The lateral mechanical compliance of the optical pillars is also measured and can be as great as 30 $mu$m/mN . The optical pillars are also shown to be compliant under a compressive force thus allowing the optical I/Os to be assembled -on nonplanar surfaces such as low-cost organic substrates.
机译:我们实验性地描述了使用表面正常的机械柔性光波导或光柱进行芯片到基板的光学互连的好处。为了对光柱的性能进行基准测试,需要测量从光源到有光柱和无光柱的光耦合效率。对于光束发散角为12的光源,与无柱(自由空间)光耦合相比,光柱的50 x 150μm可将耦合效率提高2-4 dB。 30倍x 150微米的光柱可将耦合效率提高3–4.5 dB。这证明了在需要小型光电探测器(PD)和密集的光输入/输出(I / O)时使用光柱的重要性。 50乘以150微米的光柱的光过量损耗被测量为小于0.2 dB。由于支柱的高机械柔韧性,我们还证明了当光学支柱在横向方向上未对准时,它们可以提高芯片和基板之间的光学耦合效率。这一点特别重要,因为芯片和基板的热膨胀系数通常不匹配,并且在热偏移期间保持光学对准和它们之间的互连至关重要。还测量了光柱的侧向机械柔度,其最高可达30μm/ mN。还显示了光学支柱在压缩力下是柔顺的,因此允许将光学I / O组装在非平面表面(例如低成本有机基板)上。

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