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Contact-Engineered Electrical Properties of MoS_2 Field-Effect Transistors via Selectively Deposited Thiol-Molecules

机译:通过选择性沉积的硫醇分子进行MoS_2场效应晶体管的接触工程电性能

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摘要

Although 2D molybdenum disulfide (MoS2) has gained much attention due to its unique electrical and optical properties, the limited electrical contact to 2D semiconductors still impedes the realization of high-performance 2D MoS2-based devices. In this regard, many studies have been conducted to improve the carrier-injection properties by inserting functional paths, such as graphene or hexagonal boron nitride, between the electrodes and 2D semiconductors. The reported strategies, however, require relatively time-consuming and low-yield transfer processes on sub-micrometer MoS2 flakes. Here, a simple contact-engineering method is suggested, introducing chemically adsorbed thiol-molecules as thin tunneling barriers between the metal electrodes and MoS2 channels. The selectively deposited thiol-molecules via the vapor-deposition process provide additional tunneling paths at the contact regions, improving the carrier-injection properties with lower activation energies in MoS2 field-effect transistors. Additionally, by inserting thiol-molecules at the only one contact region, asymmetric carrier-injection is feasible depending on the temperature and gate bias.
机译:尽管2D二硫化钼(MoS2)由于其独特的电学和光学特性而备受关注,但与2D半导体的有限电接触仍然阻碍了高性能2D MoS2基器件的实现。在这方面,已经进行了许多研究以通过在电极和2D半导体之间插入诸如石墨烯或六方氮化硼的功能路径来改善载流子注入性能。然而,已报道的策略要求在亚微米MoS2薄片上进行相对耗时且产率低的转移过程。在这里,提出了一种简单的接触工程方法,在金属电极和MoS2通道之间引入化学吸附的硫醇分子作为薄的隧道势垒。通过气相沉积工艺选择性沉积的硫醇分子在接触区域提供了额外的隧穿路径,从而以较低的MoS2场效应晶体管的活化能改善了载流子注入特性。另外,通过在仅一个接触区域插入硫醇分子,取决于温度和栅极偏压,不对称载流子注入是可行的。

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