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On the Dynamics of Intrinsic Carbon in Copper duringthe Annealing Phase of Chemical Vapor Deposition Growth of Graphene

机译:关于铜内在本征碳的动力学石墨烯化学气相沉积生长的退火阶段

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摘要

In chemical vapor deposition (CVD) growth of graphene, intrinsic carbon in copper has been shown to play a role, especially during the nucleation phase. Here, we report experimental results on depletion of carbon from the bulk of a Cu foil to its surface at different hydrogen pressures, which explain new aspects of the interplay between hydrogen and intrinsic carbon prior to growth. We observed that rising H2 pressure boosts carbon depletion to the surface, but at the same time, at elevated H2 pressures, the graphitic film formed on the Cu surface is etched away at a faster rate. This effect led us to practice annealing of copper under high hydrogen pressure as an approach to decrease the total content of carbon in the copper foil and consequently reducing the nucleation density of graphene flakes. These results enhance our understanding about the role of H2 in the CVD process and explain some of the inconsistencies among the earlier reports.
机译:在石墨烯的化学气相沉积(CVD)生长中,铜中的固有碳已显示出作用,尤其是在成核阶段。在这里,我们报告了在不同氢气压力下从铜箔块体中的碳耗尽到其表面的碳的实验结果,这解释了生长之前氢与固有碳之间相互作用的新方面。我们观察到,升高的H2压力会促进表面碳的消耗,但与此同时,在升高的H2压力下,形成在Cu表面的石墨膜会以更快的速度被腐蚀掉。这种效果使我们在高氢气压下对铜进行退火,以降低铜箔中碳的总含量,从而降低石墨烯薄片的成核密度。这些结果加深了我们对H2在CVD过程中的作用的理解,并解释了早期报告中的某些矛盾之处。

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