Nanoscale Au-ZnO Heterostructure Developed by Atomic Layer Deposition Towards Amperometric H2O2 Detection

摘要

Angular optical image of the wafer-scale ALD deposited ZnO on Au electrodes with insert—an individual 1-cm diced structure. Experimental and model generated data for variable angle SE measurements of SiO deposited on Si wafer. Graphical scheme of (C H ) Zn and H O precursors, respectively. SE mapping of the SiO thickness in Å. SE mapping of the thickness of ZnO films in Ångstrom on a 4-in. Si/SiO wafer. Unit cell of wurtzite ZnO with red—O and blue—ZnO atoms (panel ). Atomic arrangement and (0001), (10-10) and (11-20) lattice planes B, C and D, respectively. The outline of the unit cell is shown as a black line. Reprinted from ref. [ ] with permission from Elsevier Science