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Automated Defect and Correlation Length Analysis of Block Copolymer Thin Film Nanopatterns

机译:嵌段共聚物薄膜纳米图案的自动缺陷和相关长度分析

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摘要

Line patterns produced by lamellae- and cylinder-forming block copolymer (BCP) thin films are of widespread interest for their potential to enable nanoscale patterning over large areas. In order for such patterning methods to effectively integrate with current technologies, the resulting patterns need to have low defect densities, and be produced in a short timescale. To understand whether a given polymer or annealing method might potentially meet such challenges, it is necessary to examine the evolution of defects. Unfortunately, few tools are readily available to researchers, particularly those engaged in the synthesis and design of new polymeric systems with the potential for patterning, to measure defects in such line patterns. To this end, we present an image analysis tool, which we have developed and made available, to measure the characteristics of such patterns in an automated fashion. Additionally we apply the tool to six cylinder-forming polystyrene-block-poly(2-vinylpyridine) polymers thermally annealed to explore the relationship between the size of each polymer and measured characteristics including line period, line-width, defect density, line-edge roughness (LER), line-width roughness (LWR), and correlation length. Finally, we explore the line-edge roughness, line-width roughness, defect density, and correlation length as a function of the image area sampled to determine each in a more rigorous fashion.
机译:由薄片状和圆柱状形成的嵌段共聚物(BCP)薄膜生产的线型图案因其在大面积上实现纳米级图案化的潜力而备受关注。为了使这样的图案形成方法有效地与当前技术集成,所得到的图案需要具有低的缺陷密度,并在短时间内生产。为了了解给定的聚合物或退火方法是否可能潜在地应对此类挑战,有必要检查缺陷的演变。不幸的是,很少有工具可供研究人员使用,特别是那些从事合成和设计具有图案形成潜力的新型聚合物系统的工具,以测量这种线条图案中的缺陷。为此,我们提出了一种图像分析工具,该工具已经开发并可用,可以自动方式测量此类图案的特征。此外,我们将该工具应用于热退火的六种圆筒形聚苯乙烯嵌段聚(2-乙烯基吡啶)聚合物,以探索每种聚合物的尺寸与测量特性之间的关系,包括线周期,线宽,缺陷密度,线边粗糙度(LER),线宽粗糙度(LWR)和相关长度。最后,我们探索线边缘粗糙度,线宽粗糙度,缺陷密度和相关长度与所采样图像区域的关系,从而以更严格的方式确定每个像素。

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