METHOD FOR MANUFACTURING MIXED BLOCK COPOLYMER THIN FILM, METHOD FOR MANUFACTURING MIXED BLOCK COPOLYMER TEMPLATE, AND THIN FILM AND TEMPLATE MANUFACTURED USING MIXED BLOCK COPOLYMER

摘要

A method for manufacturing a mixed block copolymer thin film, a method for manufacturing a mixed block copolymer template, and the mixed block copolymer thin film and template manufactured thereby are provided. The method for manufacturing a mixed block copolymer thin film according to the present invention comprises: a step for making mixed liquid by mixing a first block copolymer which is self-assembled with high molecular weight and long length of chain and a second block copolymer which is symmetric and which has lower molecular weight and shorter length than the first block copolymer low molecular weight; a step of forming a block copolymer thin film by laminating the mixed liquid; and a step for self-assembling by heat treating the block copolymer thin film.;COPYRIGHT KIPO 2014;[Reference numerals] (AA) Existing technique;(BB) Present invention