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Beneficial defects: exploiting the intrinsic polishing-induced wafer roughness for the catalyst-free growth of Ge in-plane nanowires

机译:有益的缺陷:利用固有的抛光诱导的晶片粗糙度来实现Ge平面纳米线的无催化剂生长

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摘要

We outline a metal-free fabrication route of in-plane Ge nanowires on Ge(001) substrates. By positively exploiting the polishing-induced defects of standard-quality commercial Ge(001) wafers, micrometer-length wires are grown by physical vapor deposition in ultra-high-vacuum environment. The shape of the wires can be tailored by the epitaxial strain induced by subsequent Si deposition, determining a progressive transformation of the wires in SiGe faceted quantum dots. This shape transition is described by finite element simulations of continuous elasticity and gives hints on the equilibrium shape of nanocrystals in the presence of tensile epitaxial strain.PACS81.07.Gf; 68.35.bg; 68.35.bj; 62.23.Eg
机译:我们概述了Ge(001)衬底上的平面Ge纳米线的无金属制造路线。通过积极利用标准品质的商用Ge(001)晶圆的抛光引起的缺陷,可以通过在超高真空环境中进行物理气相沉积来生长微米长度的导线。可以通过随后的Si沉积引起的外延应变来定制导线的形状,从而确定导线在SiGe刻面量子点中的渐进转变。这种形状过渡通过连续弹性的有限元模拟来描述,并在存在外延拉伸应变的情况下提示纳米晶体的平衡形状。PACS81.07.Gf; 68.35.bg; 68.35.bj; 62.23。

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