We present and demonstrate an approach for femtosecond laser processing by using patterned vector optical fields (PVOFs) composed of multiple individual vector optical fields. The PVOFs can be flexibly engineered due to the diversity of individual vector optical fields in spatial arrangement and distribution of states of polarization, and it is easily created with the aid of a spatial light modulator. The focused PVOFs will certainly result in various interference patterns, which are then used to fabricate multi-microholes with various patterns on silicon. The present approach can be expanded to fabricate three-dimensional microstructures based on two-photon polymerization.
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