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Fabrication of 3D Carbon Microelectromechanical Systems (C-MEMS)

机译:3D碳微机电系统(C-MEMS)的制造

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摘要

A wide range of carbon sources are available in nature, with a variety of micro-anostructure configurations. Here, a novel technique to fabricate long and hollow glassy carbon microfibers derived from human hairs is introduced. The long and hollow carbon structures were made by the pyrolysis of human hair at 900 °C in a N2 atmosphere. The morphology and chemical composition of natural and pyrolyzed human hairs were investigated using scanning electron microscopy (SEM) and electron-dispersive X-ray spectroscopy (EDX), respectively, to estimate the physical and chemical changes due to pyrolysis. Raman spectroscopy was used to confirm the glassy nature of the carbon microstructures. Pyrolyzed hair carbon was introduced to modify screen-printed carbon electrodes ; the modified electrodes were then applied to the electrochemical sensing of dopamine and ascorbic acid. Sensing performance of the modified sensors was improved as compared to the unmodified sensors. To obtain the desired carbon structure design, carbon micro-anoelectromechanical system (C-MEMS/C-NEMS) technology was developed. The most common C-MEMS/C-NEMS fabrication process consists of two steps: (i) the patterning of a carbon-rich base material, such as a photosensitive polymer, using photolithography; and (ii) carbonization through the pyrolysis of the patterned polymer in an oxygen-free environment. The C-MEMS/NEMS process has been widely used to develop microelectronic devices for various applications, including in micro-batteries, supercapacitors, glucose sensors, gas sensors, fuel cells, and triboelectric nanogenerators. Here, recent developments of a high-aspect ratio solid and hollow carbon microstructures with SU8 photoresists are discussed. The structural shrinkage during pyrolysis was investigated using confocal microscopy and SEM. Raman spectroscopy was used to confirm the crystallinity of the structure, and the atomic percentage of the elements present in the material before and after pyrolysis was measured using EDX.
机译:自然界中可以使用各种各样的碳源,具有各种微/纳米结构配置。在此,介绍了一种新颖的技术来制造源自人发的长而空心的玻璃状碳微纤维。长而空心的碳结构是通过在N2气氛中900°C下人发热解而制成的。分别使用扫描电子显微镜(SEM)和电子分散X射线能谱(EDX)研究了自然和热解人发的形态和化学成分,以评估热解引起的物理和化学变化。拉曼光谱法用于确认碳微结构的玻璃态性质。引入了热解毛碳来修饰丝网印刷碳电极;然后将修饰的电极应用于多巴胺和抗坏血酸的电化学传感。与未修改的传感器相比,修改后的传感器的传感性能得到了改善。为了获得所需的碳结构设计,开发了碳微/纳米机电系统(C-MEMS / C-NEMS)技术。最常见的C-MEMS / C-NEMS制造过程包括两个步骤:(i)使用光刻法对富碳基材(例如光敏聚合物)进行构图; (ii)通过在无氧环境中将构图的聚合物热解而碳化。 C-MEMS / NEMS工艺已被广泛用于开发各种应用的微电子设备,包括微电池,超级电容器,葡萄糖传感器,气体传感器,燃料电池和摩擦电纳米发电机。在这里,讨论了使用SU8光致抗蚀剂的高纵横比的实心和空心碳微结构的最新发展。使用共聚焦显微镜和SEM研究了热解过程中的结构收缩。拉曼光谱法用于确认结构的结晶度,并使用EDX测量热解前后材料中存在的元素的原子百分比。

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