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Manipulations of Wavefront Propagation: Useful Methods and Applications for Interferometric Measurements and Scanning

机译:波前传播的操纵:干涉测量和扫描的有用方法和应用

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摘要

Phase measurements obtained by high-coherence interferometry are restricted by the 2π ambiguity, to height differences smaller than λ/2. A further restriction in most interferometric systems is for focusing the system on the measured object. We present two methods that overcome these restrictions. In the first method, different segments of a measured wavefront are digitally propagated and focused locally after measurement. The divergent distances, by which the diverse segments of the wavefront are propagated in order to achieve a focused image, provide enough information so as to resolve the 2π ambiguity. The second method employs an interferogram obtained by a spectrum constituting a small number of wavelengths. The magnitude of the interferogram's modulations is utilized to resolve the 2π ambiguity. Such methods of wavefront propagation enable several applications such as focusing and resolving the 2π ambiguity, as described in the article.
机译:通过高相干干涉术获得的相位测量值受到2π模糊度的限制,以使其高度差小于λ/ 2。大多数干涉测量系统的另一个限制是将系统聚焦在被测物体上。我们提出了两种克服这些限制的方法。在第一种方法中,测量后的波前的不同部分将在测量后进行数字传播和局部聚焦。为了实现聚焦图像,传播波前的不同部分以实现聚焦图像的发散距离提供了足够的信息,从而解决了2π模糊性。第二种方法采用通过构成少量波长的光谱获得的干涉图。干涉图的调制幅度用于解决2π模糊性。如前所述,这种波前传播方法可以实现多种应用,例如聚焦和解决2π模糊性。

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