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Edge-controlled growth and kinetics of single-crystal graphene domains by chemical vapor deposition

机译:通过化学气相沉积进行边缘控制的单晶石墨烯域的生长和动力学

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摘要

The controlled growth of large-area, high-quality, single-crystal graphene is highly desired for applications in electronics and optoelectronics; however, the production of this material remains challenging because the atomistic mechanism that governs graphene growth is not well understood. The edges of graphene, which are the sites at which carbon accumulates in the two-dimensional honeycomb lattice, influence many properties, including the electronic properties and chemical reactivity of graphene, and they are expected to significantly influence its growth. We demonstrate the growth of single-crystal graphene domains with controlled edges that range from zigzag to armchair orientations via growth–etching–regrowth in a chemical vapor deposition process. We have observed that both the growth and the etching rates of a single-crystal graphene domain increase linearly with the slanted angle of its edges from 0° to ∼19° and that the rates for an armchair edge are faster than those for a zigzag edge. Such edge-structure–dependent growth/etching kinetics of graphene can be well explained at the atomic level based on the concentrations of the kinks on various edges and allow the evolution and control of the edge and morphology in single-crystal graphene following the classical kinetic Wulff construction theory. Using these findings, we propose several strategies for the fabrication of wafer-sized, high-quality, single-crystal graphene.
机译:大面积,高质量,单晶石墨烯的受控生长是电子和光电子应用中的迫切需求。但是,这种材料的生产仍然具有挑战性,因为控制石墨烯生长的原子机理尚未得到很好的理解。石墨烯的边缘是碳在二维蜂窝状晶格中积累的位置,其边缘影响许多性质,包括石墨烯的电子性质和化学反应性,并且有望显着影响石墨烯的生长。我们通过化学气相沉积过程中的生长-蚀刻-再生长证明了具有受控边缘的单晶石墨烯域的生长,其边缘的范围从之字形到扶手椅状。我们已经观察到,单晶石墨烯域的生长和蚀刻速率都随其边缘的倾斜角从0°到〜19°线性增加,并且扶手椅形边缘的速率比之字形边缘的速率快。石墨烯的这种取决于边缘结构的生长/蚀刻动力学可以在原子水平上基于各种边缘上的纽结浓度很好地解释,并允许遵循经典动力学的演化和控制单晶石墨烯的边缘和形态沃尔夫夫建筑理论。利用这些发现,我们提出了制造晶片尺寸,高质量,单晶石墨烯的几种策略。

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