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Piezoelectric MEMS Resonators for Cigarette Particle Detection

机译:用于香烟微粒检测的压电MEMS谐振器

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摘要

In this work, we demonstrate the potential of a piezoelectric resonator for developing a low-cost sensor system to detect microscopic particles in real-time, which can be present in a wide variety of environments and workplaces. The sensor working principle is based on the resonance frequency shift caused by particles collected on the resonator surface. To test the sensor sensitivity obtained from mass-loading effects, an Aluminum Nitride-based piezoelectric resonator was exposed to cigarette particles in a sealed chamber. In order to determine the resonance parameters of interest, an interface circuit was implemented and included within both open-loop and closed-loop schemes for comparison. The system was capable of tracking the resonance frequency with a mass sensitivity of 8.8 Hzg. Although the tests shown here were proven by collecting particles from a cigarette, the results obtained in this application may have interest and can be extended towards other applications, such as monitoring of nanoparticles in a workplace environment.
机译:在这项工作中,我们演示了压电谐振器在开发低成本传感器系统以实时检测微观颗粒方面的潜力,该系统可以存在于各种环境和工作场所中。传感器的工作原理是基于共振器表面上收集的颗粒引起的共振频率偏移。为了测试从质量负载效应获得的传感器灵敏度,将基于氮化铝的压电谐振器暴露在密封室内的香烟颗粒中。为了确定感兴趣的谐振参数,实施了接口电路并将其包括在开环和闭环方案中以进行比较。该系统能够以8.8 Hz / ng的质量灵敏度跟踪共振频率。尽管此处显示的测试已通过从香烟中收集颗粒而得到证明,但本应用程序中获得的结果可能令人感兴趣,并且可以扩展到其他应用程序,例如在工作场所环境中监控纳米颗粒。

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