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Machining of Lenticular Lens Silicon Molds with a Combination of Laser Ablation and Diamond Cutting

机译:激光烧蚀与金刚石切割相结合的双凸透镜硅模具加工

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摘要

Lenticular lenses are widely used in the three-dimensional display industry. Conventional lenticular lens components are made of plastics that have low thermal stability. An alternative is to use glass to replace plastic as the lenticular lens component material. Single crystal silicon is often used as the mold material in the precision glass molding process. It is, however, difficult to fabricate a lenticular lens silicon mold that has a large feature size compared to the critical depth of cut of silicon. In order to solve the problems of machining lenticular lens silicon molds using the conventional diamond cutting method, such as low machining efficiency and severe tool wear, a hybrid machining method that combined laser ablation and diamond cutting was proposed. A feasibility study was performed to investigate the possibility of using this method to fabricate a lenticular lens silicon mold. The influence of the laser parameters and machining parameters on the machining performance was investigated systematically. The experimental results indicated that this hybrid machining method could be a possible method for manufacturing lenticular lens silicon molds or other similar microstructures.
机译:双凸透镜广泛用于三维显示行业。常规的双凸透镜组件由具有低热稳定性的塑料制成。一种替代方法是使用玻璃代替塑料作为双凸透镜组件材料。在精密玻璃模制过程中,单晶硅通常用作模制材料。然而,与硅的临界切割深度相比,难以制造具有大特征尺寸的双凸透镜硅模具。为了解决使用传统的金刚石切割方法加工双凸透镜硅模具的问题,例如加工效率低和刀具磨损严重,提出了一种结合激光烧蚀和金刚石切割的混合加工方法。进行了可行性研究,以调查使用此方法制造双凸透镜硅模具的可能性。系统地研究了激光参数和加工参数对加工性能的影响。实验结果表明,这种混合加工方法可能是制造双凸透镜硅模具或其他类似微结构的可能方法。

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