光学方法在真空计量中应用研究进展

摘要

Abstrct:The research and development works with optical methods are considered to be one emerging area in the field of vacuum metrology. Typical examples of these kinds of techniques for primary and secondary standards are present-ed,such as the fixed-length,Fabry-Pérot optical cavity for the rough vacuum regime,Tunable Diode Laser Absorption Spectroscopy(TDLAS) for its use as a primary standard for partial pressure measurement,dynamic vacuum calibration with Michelson interferometer and determination of the gas micro-flow by the optical interferometric technique. It can be convinced that the measurement uncertainties of the current vacuum standards will be reduced substantially by the optical methods. At the same time,the future of vacuum measurement will rely on quantum-based primary standard which repre-sents a disruptive change in the way of realizing and disseminating the SI unit of pressure,the pascal.%光学方法在真空计量中的应用研究是真空计量中的新学科。固定长度法布里-珀罗光学谐振腔应用在粗低真空校准技术、可调谐二极管激光吸收光谱（TDLAS）应用在分压力校准技术、迈克尔逊干涉仪动态真空校准技术以及基于法布里-珀罗（Fabry-Pérot）光学干涉法应用在气体微流量测量技术。文中介绍了原理、校准装置的结构及性能等。从中可以看出，近年来随着学科的交叉融合，采用光学方法的真空计量技术大幅减小了现有真空计量标准的测量不确定度，促进真空计量由实物标准向量子标准转变，并对真空基本量复现，以及今后真空国际单位制的重新定义具有重要的意义。