MPCVD制备大面积自支撑金刚石膜研究进展

摘要

金刚石膜因其优异的物理化学性质备受关注，而大面积自支撑金刚石膜因其结构完整性在各大领域的应用范围更胜一筹。综述了大面积自支撑金刚石膜的、研究进展和影响其沉积均匀性和沉积速率的因素。表明微波频率越高，沉积速率越快；而气体流速对沉积速率的影响呈现先增大后减少的趋势；基片台的设计对金刚石的均匀性至关重要；辅助气体对金刚石膜的影响与添加的气体种类有关，微量N2、O2的加入可以提高沉积速率。最后对大面积自支撑金刚石在红外窗口的应用进行展望。%The diamond films is becoming focus in recent years because of their outstanding physical and chemical properties,whereas,the large-area freestanding diamond films have a wilder application in all fields,owing to their struc-tural integrity. In this paper,the research progress and factors which determines the growth uniformity and growth rates of the large-area freestanding diamond films are outlined. Experiments showed that,the higher the microwave frequency is, the faster deposition rate will be;the influence of gas flow rate on the deposition rate has a tendency of decrease after in-creasing;the design of substrate holders is important to the uniformity of diamond films,the influence of auxiliary gas on diamond films depends on gas species;the addition of traces N2,O2 can increase the deposition rate. Besides,the applica-tions of the large-area freestanding diamond films in IR windows are prospected.