SUBSTRATE FOR DIAMOND GROWTH AND MANUFACTURING METHOD FOR THE SAME, AND MANUFACTURING METHOD FOR LARGE-AREA SINGLE-CRYSTAL DIAMOND THIN FILM AND SELF-SUPPORTING FILM USING THE SAME

摘要

PROBLEM TO BE SOLVED: To provide a crack-free, large-area single-crystal diamond thin film and self-supporting film, and also to provide a manufacturing method for the same.;SOLUTION: A manufacture method for a diamond self-supporting film 13 comprises the steps of: growing a cBN layer 10 formed of a single-phase film on a base substrate 9; growing a separation layer 11 including hBN on the cBN layer 10; growing a diamond 12 on the separation layer 11 including the hBN; cleaving the separation layer 11 including the hBN along a surface perpendicular to a lamination direction of the separation layer 11 including the hBN to divide the cBN layer and the diamond 12; and removing the separated separation layer 11b including the hBN, which remains adhering to the diamond 12.;COPYRIGHT: (C)2015,JPO&INPIT