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The use of spectroscopy methods for structural analysis of CVD diamond films, polycrystalline and single-crystal diamonds

机译:CVD金刚石薄膜,多晶硅和单晶钻石结构分析的光谱学方法

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For the work results correct interpretation, it is important to study initial materials that scientists have to deal with. Currently, there are a large number of different diamond substrates. Comparison of materials among themselves allows you to determine which material you are dealing with. In this work, the methods of infrared (IR) spectrometry, Raman spectroscopy and spectrophotometry are used to study four types of diamond materials: diamond polycrystalline CVD-films; natural single-crystal diamonds; synthetic polycrystalline HPHT-diamonds (such as DSPC – diamond synthetic polycrystal by GOST 9206-80); polycrystalline CVD-diamonds CDM manufactured by E6. In work it was shown that the Raman spectroscopy allows to measure the effect of heat treatment on changes in the diamond structure, even if it is such highly advanced diamond materials as natural diamonds. Heat treatment affects the perfection of diamond crystal structure by reducing stresses and the number of defects in it due to graphitization process. The IR spectrometry method is effective for determining the shape and amount of nitrogen inclusions in diamond structure. To study polycrystalline CVD-films, the spectrophotometry method turned out to be the most effective, because it made possible to determine a small number of nitrogen defects and draw conclusions about the quality of the films. The investigation of polycrystalline diamonds CDM and DSPC demonstrated that, despite their coarse-crystalline structure, diamond crystallites consist of a highly defective diamond phase; in addition, DSPC-diamonds were studied using this method in the first time.
机译:对于工作结果正确的解释,研究科学家必须处理的初始材料非常重要。目前,有大量不同的钻石基板。它们之间材料的比较允许您确定您正在处理哪些材料。在这项工作中,红外(IR)光谱法,拉曼光谱和分光光度法用于研究四种类型的金刚石材料:金刚石多晶CVD膜;天然单晶钻石;合成多晶HPHT-金刚石(如GOST 9206-80的DSPC - 金刚石合成多晶);由E6制造的多晶CVD-钻石CDM。在工作中,显示拉曼光谱允许测量热处理对金刚石结构的变化的影响,即使是天然钻石的高级钻石材料。热处理通过降低压力和由于石墨化工艺而减少压力和缺陷的数量来影响金刚石结构的完善。 IR光谱法对于确定金刚石结构中的氮气夹杂物的形状和量是有效的。为了研究多晶CVD膜,分光光度法是最有效的,因为它可以确定少量氮缺陷并得出关于薄膜质量的结论。对多晶金刚石CDM和DSPC的研究表明,尽管它们具有粗晶结构,但金刚石晶体由高度缺陷的金刚石相;此外,首次使用该方法研究了DSPC-钻石。

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