基于微变电容式传感器的角度-振动测量方法

摘要

A technique to detect angle and vibration is designed, which can be successfully applied in the capacitive MEMS devices. The technique is based on the DC charge and discharge theory of RC series circuit,and the vibration and angle offset can be detected by MCU system. After the original signal is processed by the appropriate filter, the noise disturbance can be reduced efficiently, and the fundamental component and the high harmonic component will be separated quickly and accurately,then the curve of the vibration and angle offset can be obtained. Experiment results show that angle detection and vibration detection can be carried out and non- interfering at the same time.%利用微变电容式MEMS传感器,设计了一种角度-振动量的检测方法.以RC串联回路直流充放电理论为基础,单片机系统为主体,实现振动量和角度偏移量的检测.经过适当的滤波算法对原始信号进行处理,可以有效地减小噪声的干扰,并快速而准确地分离出基波分量和高次谐波分量,进而得出较好的振动曲线和角度曲线.经实验验证:角度检测和振动检测可同时进行且互不干扰.