一种流量压力温度一体化传感器的设计

摘要

为了实现多参数综合测量,设计出一种小流量、压力、温度一体化传感器,该传感器主要由敏感元件和调理电路组成,信号输出采用0～5 V模拟输出.对传感器进行各项环境试验,试验结果表明:该传感器流量精度优于3％,压力精度优于0.2％,温度精度优于0.5％,流量热零点漂移小于0.2％ FS/℃,压力热零点漂移小于0.1％ FS/℃,满足使用要求.%The principle, design technology and fabrication of a kind of integrative sensor of small flow, pressure, temperature is introduced. The sensor is made up of sensitive element and modulating circuit is introduced. The signal output ranges 0 ~ 5 V. Various environmental experiments are carried out on transducers, the results show that the flow precision reaches 3 % , the pressure precision reaches 0. 2 % , the temperature precision reaches 0.5 % ,and the flow thermal zero drift is less than 0. 2 % FS/t, the pressure thermal zero drift is less than 0.1% FS/t. This transducer can satisfy the request of user.