微型薄膜锂离子电池正极材料LiCoO2薄膜研究

摘要

As positive electrode material,LiCoO2 thin films used for all-solid-state thin film lithium ion microbattery are studied. The phase of LiCoO2 thin films are amorphous,it is fabricated by magnetron sputtering in low gas pressure and it changes to crystalline and array closely after annealed at 400 ℃ . The electrochemical properties of LiCoO2 thin-films are then investigated. The cyclic voltammetry and constant current charge-discharge tests indicate that the LiCoO2 thin films without annealed have no oxidation/ reduction peaks,which indicates that they do not have lithium-ion insertion/ extrusion of reversibility,while the LiCoO2 thin films after annealed have a good reversibility from the second lap. The prepared LiCoO2 thin films closely adhere to the substrate with good crystalline state,close texture and good cycling performance,can be used for all-solid-states thin film lithium-ion microbatteries.%研究了应用于微型全固态薄膜锂离子电池的正极材料钴酸锂 LiCoO2薄膜材料，采用磁控溅射法来制备，对其进行400℃退火处理后，进行 XRD 分析和 SEM 分析，表明在低气压条件下制备的薄膜呈非晶态，经过退火后，形成了排列致密的晶体结构，薄膜沿（003）晶面平行于基底择优生长；循环伏安测试和恒电流充放电测试表明，未经过退火处理的 LiCoO2薄膜不具有锂离子嵌入/脱出的可逆性，而经过退火处理的 LiCoO2薄膜从第二圈开始具有较好的可逆性。制备的 LiCoO2薄膜结晶状态优良、质地紧密、与衬底薄膜紧密接触、循环性能和循环充放电性能良好，可以用于微型全固态薄膜锂离子电池。