设计了基于压电型微驱动器的宏微双驱动精密定位系统,宏动台由伺服电动机直接驱动,微动台由压电陶瓷驱动器和弹性铰链构成,并由压电陶瓷驱动器驱动.微动台安装在宏动台上,微动台和宏动台是串联关系.宏动台用于实现大行程微米级定位,而纳米级定位由微动台实现.利用基于运动控制卡的开放伺服功能来协调宏微工作台之间的控制,而位置反馈由两个高精度光栅完成,精度检测由激光干涉仪完成.当宏动台运动结束后,微动台根据测得的定位误差做出补偿进给.实验表明,在行程100 mm的范围内每隔1 mm采集一点,误差控制在±100 nm以内.%Based on the piezoelectric driver, a macro-micro dual drive precision positioning system was designed. The macro stage of the system was drove by servo motor. The micro stage was consisted of piezoelectric driver and flexible hinge, and drove by the former. The micro stage was mounted on the macro stage and showed a series connection. The macro stage and micro stage were used to realize large workspace and compensate the error of position, respectively. With the open serve control of motion control card, the control system of macro motion and micro motion was harmonized. The positioning feedback was realized by two high precision optical grating. The precision detection was completed by laser interferometer. In the whole closed loop control system, the micro stage compensated the position error when the macro stage finished moving. Experiment results showed that within the travel range of 100 mm, the position error in every millimeter was less than ±100 nm.
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