LINEAR MOTOR COMMON STATOR DUAL-DRIVE MACRO/MICRO INTEGRATED HIGH-SPEED PRECISION MOTION ONE-DIMENSIONAL PLATFORM

摘要

The present invention proposes a linear motor common stator dual-drive macro/micro integrated high-speed precision motion one-dimensional platform, including a base, linear guide rails, slide blocks, a U-shaped linear motor stator, a macro motion rotor, a micro motion rotor and a macro/micro integrated platform. A macro motion platform and a micro motion platform are connected to form an integrated platform by virtue of an elastic member, an outer frame of the macro/micro integrated platform is mounted on the linear guide rails and the slide blocks, the U-shaped linear motor stator is arranged on the base, rotors are respectively mounted on the macro motion platform and the micro motion platform, and large-scale overall high-speed motion can be realized when macro and micro rotors are simultaneously driven; and when a motion deviation occurs, the micro motion platform realizes precise displacement output by virtue of elastic deformation due to small inertia and zero friction, and high-frequency motion deviation compensation can be realized by virtue of individual drive. Due to composite motion control, one-dimensional high-speed precision motion can be realized, an installation and use manner is consistent with that of the traditional platform, and the one-dimensional platform is convenient to popularize and use.