中阶梯光栅衍射效率及杂散光检测系统设计

摘要

Echelle,which is highly appreciated due to its excellent properties in recent years,has the advantages of low groove density,wide blaze angle,high diffraction grades,wide spectral range,high dispersion ratio,and high spectral resolution.Diffraction efficiency and stray light coefficient which can express the quality of the echelle directly reflect the optical properties of the echelle.Thus,accurate measuring of the diffraction efficiency and stray light coefficient is the precondition for grating applications.Therefore,based on the diffraction theory of echelle,the paper creatively puts forward a thought of using one system measuring echelle diffraction efficiency and stray light coefficient.The system introduces a double-rail structure,possessing the advantages of simple and novel structure,multiple functions in one machine.Through theoretical analysis and calculation,the structural parameters of the detection system are determined.The results indicate that the system can be used to measure echelle diffraction efficiency with the spectral range from 190 to 1 100 nm,and the system can also be used to measure echelle stray light with the spectral range from 200 to 800 nm,achieving the purpose for measurement of diffraction efficiency and stray light in one system.%中阶梯光栅具有刻线密度低、闪耀角度大、衍射级次高、光谱范围宽、色散率大、光谱分辨率高等一系列突出优点,近年来由于其优良的性能而倍受青睐.作为评价中阶梯光栅质量的衍射效率和杂散光系数直接体现了中阶梯光栅的光学性能,能够准确地进行中阶梯光栅衍射效率和杂散光系数的测量是光栅应用的前提.鉴于此,基于中阶梯光栅的衍射理论创造性地提出用一套系统对中阶梯光栅的衍射效率和杂散光系数进行检测,该系统引入双轨结构,具有结构简单新颖、一机多能等优点.通过理论分析和计算,确定了检测系统的结构参数,设计结果表明:该检测系统可用于测量190～1 100 nm光谱范围内的中阶梯光栅绝对衍射效率,同时也可用于测量200～800 nm光谱范围内的中阶梯光栅杂散光系数,实现了将衍射效率测量和杂散光测量集于一体的设计思想.