半导体金属氧化物气敏材料的研究进展

摘要

Introduced the types of gas sensitive materials of metal oxide semiconductor and the newest development in the abroad and home. Analyzed the disadvantages of gas sensitive materials of metal oxide semiconductor now. And discussed the development tendency.%较全面地介绍了半导体金属氧化物气敏材料的分类及国内外最新发展状况，分析了当前半导体金属氧化物气敏材料应用中存在的不足，并探讨了其发展趋势。