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PREPARATION METHOD FOR MULTI-LAYER METAL OXIDE POROUS FILM NANO GAS-SENSITIVE MATERIAL
PREPARATION METHOD FOR MULTI-LAYER METAL OXIDE POROUS FILM NANO GAS-SENSITIVE MATERIAL
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机译:多层金属氧化物多孔膜纳米气敏材料的制备方法
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摘要
The present invention discloses a method for preparing a multilayer metal oxide nano-porous thin film gas sensitive material, in which the microsphere aqueous solution is self-assembled on a substrate covered with an insulating layer, to form a compact single-layer array template; the surface of these microspheres are etched by using a plasma etching method to reduce the pitches between the microspheres; the metal oxide thin film is deposited by a physical deposition method; the template is removed by ultrasonic treatment with a solvent to prepare a porous array metal oxide thin film; and annealing is performed in air atmosphere to obtain the metal oxide porous thin film gas sensitive material. The present invention can be used for preparing a regular porous array thin film gas sensitive material; the pore size of the prepared porous thin film material is uniform and controllable; and the combination of these materials is controllable.
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