氧化铌靶材广泛应用于变色玻璃及低辐射玻璃镀膜,用于制备靶材的氧化铌要求有较高的振实密度.为提高氧化铌产品的振实密度,采用聚乙烯醇(PVA)黏结剂混合氧化铌粉体、压块,真空烧结炉于1200 ℃高温烧结3 h,然后进行粉碎过筛,制备出黑色的铌氧化物粉体;并用XRD、TEM等手段对粉体物相、成分,颗粒大小及微观形貌进行了研究,同时对粉体粒度分布、振实密度及氧含量进行了测试.结果显示粉体D50=6.64 μm,振实密度2.28 g/cm3,失氧量为粉末中总氧含量(质量)的13.6%,铌氧化物分子式接近NbO2,达到喷涂靶材用原料质量要求.%Niobium oxide target is widely used in discoloration glass and low-emissivity glass coating. The niobi-um oxide,which is used to prepare the target material,requires a higher tap density. In order to improve the tap density of niobium oxide products. PVA binder was used to mix niobium oxide powder,briquettes and vacuum sin-tering furnaces at high temperature,and then pulverized and sieved. The phase,composition,particle size and mi-crostructure of the powders were studied by means of XRD,TEM and other means. At the same time,the particle size distribution,tap density and oxygen content of the powders were tested. The results show that the powder D50=6.64 μm,the tap density of 2.28 g/cm3,the amount of oxygen loss,the amount of oxygen and the oxygen con-tent of the powder were measured. For the powder in the total oxygen content (mass) of 13.6%, niobium oxide molecular formula close to NbO2,to spray the target material with the quality requirements.
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