直线式时栅位移传感器原理与结构

摘要

在已研制成功的圆时栅的基础上,开展了比圆分度应用范围更广的直线式时栅传感器的研究.直线式时栅基于直线电机原理建立物理模型与数学模型,作为直线式时栅的理论基础和技术依据.提出了直线式时栅的机械结构型式,同时研究了增量式时栅的信号处理电路及软件系统.研究结果表明,该模块测量精度高于现有直线式传感器的中高档水平,具有较好的工艺性且成本低于现有中低档直线式传感器.%Based on successfully researched and developed circular time grating, the study on linear time grating sensor that features wider applicable fields than circular indexing is carried out. Physical and mathematical models are established on the basis of linear motor principle, and used as the theoretical foundation and technologic criteria. The mechanical structural pattern is proposed, and the signal processing circuit and software system of incremental time grating are researched. The result of research indicates that the measurement accuracy is higher than those of existing high and middle grade linear time grating sensors, while the cost is tower than existing middle and low grade sensors.