Origin软件在“电容-电压法测半导体杂质浓度分布”实验中的应用

摘要

基于电容-电压法（简称C-V法）来测量半导体杂质浓度分布，简单快速且不破坏样品。为更快速、精确求得半导体杂质浓度分布，利用Origin软件绘出样品的C-V曲线、1C2-V曲线的线性拟合，快速求出杂质浓度、自建场及绘制相应的杂质浓度分布曲线。%The capacity-voltage method( C-V method)for measuring impurity distribution is fast,non-destruc-tive and easy to implement.In order to get impurity distribution more quickly and exactly,this paper plot C-V curve ,1C2 -Vcurve and curve fitting by the origin software to calculate the impurity concentrations,and the im-purity distribution curve is more simple and convenience to obtain.