声光调制器低分辨力时邻近效应的校正

摘要

In order to efficiently correct the optical proximity effect in Laser Direct Writing (LDW), a correction method for low resolution acoustooptic modulator is proposed. Firstly, based on Iterative Error-Correction Method (IECM) proposed by Rajesh Menon, one virtual high resolution acoustooptic modulator is used to correct the direct writing pattern, and the exposure data obtained are converted and rounded to that corresponding to the low resolution acoustooptic modulator, then the exposure data of spots nearest to each error area barycenter are modulated, and the above steps help IECM correct the optical proximity with low resolution acoustooptic modulator and make a thorough optimization. Experimental results indicate that, taking "L" design pattern as example, compared with IECM unable to correct the direct writing pattern with low resolution acoustooptic modulator, the proposed method in this subject can be used to correct the direct writing pattern, which decreases pattern error value by 70.88% relative to the initial error value.%为了有效校正激光直写中的邻近效应,提出了声光调制器低分辨力时邻近效应的校正方法.该方法首先利用误差校正迭代方法以虚拟的高分辨力声光调制器对直写图案进行校正,再将此时的曝光量数据转换圆整以适用于低分辨力声光调制器,然后对各误差区域重心的最邻近光点在曝光数据调制范围内以曝光当量为步长进行遍历寻优.该方法可有效克服误差校正迭代方法不能以低分辨力声光调制器校正直写图案以及寻优不彻底的缺点.实验表明,以“L”直写图案为例,本文方法使低分辨力声光调制器时的图案误差相对于原始误差减小了70.88％.