State Key Laboratory of Precision Measuring Technology&Instruments Centre of MicroNano Manufacturing Technology Tianjin University Tianjin 300072 China;
Tianjin Kaiprin Optoelectronic Technology Co. Ltd. Tianjin 300300 China;
Ultrafast Laser Lab Tianjin University Tianjin 300072 China;
Ultrafast Laser Lab Tianjin University Tianjin 300072 China;
State Key Laboratory of Precision Measuring Technology&Instruments Centre of MicroNano Manufacturing Technology Tianjin University Tianjin 300072 China;
State Key Laboratory of Precision Measuring Technology&Instruments Centre of MicroNano Manufacturing Technology Tianjin University Tianjin 300072 China;
State Key Laboratory of Precision Measuring Technology&Instruments Centre of MicroNano Manufacturing Technology Tianjin University Tianjin 300072 China;
State Key Laboratory of Separation Membranes and Membrane Processes Tiangong University Tianjin 300387 China;
State Key Laboratory of Precision Measuring Technology&Instruments Centre of MicroNano Manufacturing Technology Tianjin University Tianjin 300072 China;
Tianjin Kaiprin Optoelectronic Technology Co. Ltd. Tianjin 300300 China;
Tianjin Kaiprin Optoelectronic Technology Co. Ltd. Tianjin 300300 China;
CAS Key Laboratory of Quantum Information University of Science and Technology of China Hefei 230026 China;
Fraunhofer Institute for Integrated Systems and Device Technology (IISB) Schottkystrasse 10 Erlangen 91058 Germany;