基于反转法的超精密气体主轴回转精度测量不确定度研究

摘要

For assessing dispersiveness of measuring result of rotation accuracy of high-precision aerostatic spindle,based on the test-bed for aerostatic spindle rotation accuracy which is independently designed and developed,some work is done for analyzing uncertain factors and their influence on the measuring result of rotation accuracy of high-precision aerostatic spindle,and then a comprehensive method for assessing the uncertainty of rotation accuracy is developed.Our research provides the basis for assessing local precision of Laser Tracker,and analyzing the influence of some uncertain factors (such as environmental change and personnel operation) on measuring resultes,and it is beneficial for improving comprehensive accuracy of measurement.%为了评定超精密主轴回转精度准确度测量结果的分散性,在自主研发的气体静压主轴回转精度测试平台上进行了反转法测试,通过试验分析了影响测量结果的各不确定度因素及其相互影响关系,并提出了综合评估测量不确定度的完整流程.评定结果可作为仪器精度的现场评估、分析环境变化以及人员操作等对测量结果影响的依据,并为提高综合测量精度提供方向指导.