尺蠖压电驱动器的设计及迟滞补偿控制方法

摘要

设计了一种基于柔性放大原理的尺蠖压电驱动器,驱动器动子钳位部分采用对称式杠杆放大结构,中间驱动部分采用复合桥式结构.根据尺蠖压电驱动器迟滞非线性特点,在模型分析基础上,建立Preisach模型,确定逆Preisach迟滞模型的开环控制方法,并采用前馈PID方法实现闭环控制.搭建了尺蠖压电驱动器的开环实验系统,实验结果显示:尺蠖压电驱动器在开环控制下位移跟踪最大误差为2.9 μm;当跟踪位移为80 μm连续运动20个步距时,正反向行程的平均误差为2.1μm;当驱动电压为5V时,获得最小步距1.5μm.同时,搭建了尺蠖压电驱动器的闭环实验系统,在该系统上进行前馈PID控制实验,闭环控制条件下,系统位移跟踪的最大误差为1.4 μm,驱动器的定位精度得到提高.%A piezoelectric inchworm actuator based on the principle of flexible amplification was developed.In the moving mechanism of the actuator,symmetrical lever amplification structure was adopted in the clamping mechanism.The compound bridge structure was used in the middle drive mechanism.According to hysteresis compensation control methods,Preisach model was built on the basis of the model analysis,inverse Preisach model was determined to be applied to the open-loop control method.And the feed forward PID control method was carried on to improve the property of the actuator further.Open-loop control experiment system of the piezoelectric inchworm actuators was established.The results show that the maximum displacement deviation is 2.9 μm;The average is 2.1 μm when the tracking displacement is 80 μm and the number of the pitches is 20 in the test of forward and reverse itinerary continuous movement.The smallest step displacement of signal stroke is 1.5 μm when the voltage is 5 V.Closed-loop control experiment system of the piezoelectric inchworm actuators was established to carry out the feed forward PID control experiment.The maximum deviation displacement of the system during the tracking is 1.4 μm,the positioning accuracy of the actuator is improved.